wave front deformation in single pass:
<1,5 λ PV
weight:
8kg
mechanical mount:
Zygo Bajonett
wave front deformation in single pass:
<1,5 λ PV
weight:
8kg
mechanical mount:
Zygo Bajonett
Technical Data: | |
|---|---|
Interferometer Mount | 6” Zygo Bayonet |
Vertical DNL Movement Range | <= 500 mm |
Free aperture of the DNL retainer | 160 mm |
X-Y-fine adjustment | ± 4 mm |
Z-Fineadjustment | ± 6 mm |
Z-Coarse Adjustment | 340 mm @500 mm column length |
Theta - Tilt axis | ± 1° |
Phi - Tilt axis | ± 1° |
Typical linear scales from Heidenhain or Mitutoyo provide a measuring accuracy of about +/- 3μ. For short radii below 50mm this is not accurate enough because this potential inaccuracy can exceed the given radius tolerance of typically 1-3 fringes.
In addition there is a potential error due to the distance of the linear scale to the optical axis of the system.
SRM-Plus is the innovative solution for this problem. A high precise indicator with remote control for zero setting allows the precise measurement of radii up to 60mm (cx and cc) directly in the optical axis of the system with an accuracy of 1μ.
fineoptix GmbH
Division MPF-Systems
Schmalheck 18
35625 Huettenberg, Germany
Tel.: +49-6441-210 4910
Fax: +49-6441-210 4911